Title :
EWOD using P(VDF-TrFE)
Author :
Zhao, Pingan ; Li, Yinqing ; Zeng, Xiangyu ; Zhou, Jia ; Huang, Yiping ; Liu, Ran
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai
Abstract :
A novel electrowetting on dielectric (EWOD) digital microfluidic device using the high dielectric constant material P(VDF-TrFE) (poly-vinylidene fluoride-trifluoroethylene) as the dielectric layer fabricated by spin-coating process is proposed. The device is featured with the advantages of both IC compatible process and low driving voltage. The contact angle between the liquid droplet and surface of the device changes from 118deg to 75deg under an applied voltage of 30 V. The voltage-polarity-related electrowetting on dielectric phenomenon is observed and applied in our study. A novel single-side coplanar electrodes EWOD device is developed. EWOD at positive and negative voltage is so different that a droplet 3 muL is successfully transported reciprocally under 20 V based on the polarity change of driving voltage.
Keywords :
contact angle; dielectric thin films; electrodes; microfabrication; microfluidics; polymers; spin coating; wetting; EWOD; contact angle; dielectric layer fabrication; digital microfluidic device; driving voltage polarity change; electrowetting-on-dielectric; poly-vinylidene fluoride-trifluoroethylene; single-side coplanar electrode; spin-coating process; voltage 20 V; voltage 30 V; voltage-polarity-related electrowetting; Current density; Electrochemical processes; Electrodes; Food preservation; Nanowires; Nitrogen; Polymers; Protection; Systems engineering and theory; Temperature; EWOD; P(VDF-TrFE); digital microfluidics; voltage-polarity-related;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068559
