State engine based validation of MEMS process sequences

Author

Zhao, Xu ; Zhao, Xin ; Lu, Guizhang

Author_Institution

Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

215

Lastpage

218

Abstract

The validation of process sequences could use the process expert knowledge of specific MEMS pipeline to reason out whether the user-defined process sequences can be manufactured on this pipeline. The process, its parameters and the order of process sequences have great impact on the result of the MEMS device manufactured, even result in that the user-defined process sequences can´t be manufactured on specific MEMS pipeline. In this paper we put forward the validation of process sequences based on the state engine. Firstly, obtaining the process knowledge, then, generating the states of every process by the state engine, at last, reasoning out the validation result of the process sequences by using the matrix of the process states and the expert knowledge.

Keywords

expert systems; knowledge verification; microfabrication; MEMS pipeline; MEMS process sequences; process knowledge; state engine; validation; Engines; Expert systems; Information systems; Manufacturing processes; Microelectromechanical devices; Micromechanical devices; Oxidation; Pipelines; Robotics and automation; Systems engineering and theory; MEMS; expert system; process rules; state engine;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068562

Filename

5068562