A novel multi-direction high shock reliability test on MEMS devices

Most MEMS/NEMS devices are working on the harsh environment, such as high shock and temperature environment, ranging from aerospace science, automobile industry, mechanical engineering, to medical and safety engineering. The reliability of MEMS/NEMS devices is the most important issue today. MEMS devices must perform their required functions for the duration of the equipment´s requirement profile. However, there is a need to implement standardized tests and requirements to ensure the performance of MEMS devices in fielded and emerging military systems. This paper presents the multi-direction high shock environment for MEMS devices, and introduces a dynamic test and shock response spectra (SRS) testing technology. The simulation test of shock environment based equivalent injury theory is studied. A computation program is written in software-Matlab with the modified digital filtering algorithm. The SRS of the shock signal of dispersing is calculated. Also, the simulation of the SRS of dispersing is probed into by using drop test.