DocumentCode :
1956699
Title :
An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station
Author :
Pang, Cheng ; Zhao, Zhan ; Zhang, Jiangang ; Shi, Li ; Du, Lidong ; Fang, Zhen ; Liu, Yonghong
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing
fYear :
2009
fDate :
5-8 Jan. 2009
Firstpage :
270
Lastpage :
273
Abstract :
We present an advantageous fabrication technology for the integration of pressure sensor into the multi-sensor for micro weather station. Differing from traditional silicon piezoresistive or capacitive pressure sensor, we use platinum piezoresistive pressure sensor in the integration, which can greatly simplify the whole process and also has an excellent performance. We also use adhesive bonding with SU-8 to replace the traditional bonding methods. This bonding method outweighs the traditional bonding methods in many ways. The testing results of the pressure sensor indicate that this simple and convenient fabrication technology is advantageous for the integration.
Keywords :
microfabrication; microsensors; pressure sensors; adhesive bonding; advantageous fabrication technology; micro weather station; multi-sensor; pressure sensor; Bonding; Capacitive sensors; Electrical resistance measurement; Fabrication; Glass; Piezoresistance; Sensor phenomena and characterization; Silicon; Temperature sensors; Weather forecasting; ´micro weather station;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
Type :
conf
DOI :
10.1109/NEMS.2009.5068575
Filename :
5068575
Link To Document :
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