Title :
A strategy to predict and reduce baffle effects in linear array of CMUTs
Author :
Boulmé, Audren ; Certon, Dominique ; Sénégond, Nicolas ; Meynier, Cyril ; Teston, Franck
Author_Institution :
Centre-Val de Loire Univ., Univ. Francois-Rabelais de Tours, Tours, France
Abstract :
This paper presents a cMUT array model based on matrix formulation like for the theory of linear systems. The model is compared with experimental data from which the baffle effect phenomenon in cMUT arrays is clearly identified. We propose to use the eigen-mode decomposition of linear matrices to understand and interpret origins of these phenomena. The impact of normal modes on the radiation directivity of cMUT array is clearly analyzed. The role of some geometric parameters on the baffle effect is studied too.
Keywords :
capacitive sensors; eigenvalues and eigenfunctions; geometrical acoustics; matrix decomposition; micromachining; microsensors; ultrasonic transducer arrays; baffle effect phenomenon; baffle effect prediction; baffle effect reduction; cMUT linear array; capacitive micromachined ultrasonic transducer; eigenmode decomposition; geometric parameter; linear matrix; matrix formulation; radiation directivity; Acoustics; Admittance; Arrays; Eigenvalues and eigenfunctions; Impedance; Iron; Matrix decomposition; Baffle effect; Modal Analysis; Mutual impedance; Periodic structure;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935700
