A strategy to predict and reduce baffle effects in linear array of CMUTs

Author

Boulmé, Audren ; Certon, Dominique ; Sénégond, Nicolas ; Meynier, Cyril ; Teston, Franck

Author_Institution

Centre-Val de Loire Univ., Univ. Francois-Rabelais de Tours, Tours, France

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

1873

Lastpage

1876

Abstract

This paper presents a cMUT array model based on matrix formulation like for the theory of linear systems. The model is compared with experimental data from which the baffle effect phenomenon in cMUT arrays is clearly identified. We propose to use the eigen-mode decomposition of linear matrices to understand and interpret origins of these phenomena. The impact of normal modes on the radiation directivity of cMUT array is clearly analyzed. The role of some geometric parameters on the baffle effect is studied too.

Keywords

capacitive sensors; eigenvalues and eigenfunctions; geometrical acoustics; matrix decomposition; micromachining; microsensors; ultrasonic transducer arrays; baffle effect phenomenon; baffle effect prediction; baffle effect reduction; cMUT linear array; capacitive micromachined ultrasonic transducer; eigenmode decomposition; geometric parameter; linear matrix; matrix formulation; radiation directivity; Acoustics; Admittance; Arrays; Eigenvalues and eigenfunctions; Impedance; Iron; Matrix decomposition; Baffle effect; Modal Analysis; Mutual impedance; Periodic structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935700

Filename

5935700