• DocumentCode
    1957119
  • Title

    Application of Retarding Technology to Electron Beam Recorder

  • Author

    Kobayashi, Masaki ; Kitahara, Hiroaki ; Kojima, Yoshiaki ; Wada, Yasumitsu ; Katsumura, Masahiro ; Iida, Tetsuya

  • Author_Institution
    Corp. R&D Lab., Pioneer Corp., Saitama
  • fYear
    0
  • fDate
    0-0 0
  • Firstpage
    120
  • Lastpage
    122
  • Abstract
    The paper reports the outline of the developed electron beam recorder (EBR) for the purpose of developing future optical disk storage media. A rotation stage is developed and is installed to the EBR. The EBR using the retarding field can vary the beam energy only by adjusting the high voltage for the substrate (10 keV to 50 keV)
  • Keywords
    electron beam applications; optical disc storage; storage media; electron beam recorder; optical disk storage media; rotation stage; Acceleration; Clamps; Coaxial cables; Connectors; Electron beams; Energy resolution; Particle beams; Resists; Throughput; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Data Storage Topical Meeting, 2006
  • Conference_Location
    Montreal, Que.
  • Print_ISBN
    0-7803-9494-1
  • Type

    conf

  • DOI
    10.1109/ODS.2006.1632738
  • Filename
    1632738
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1957119