Title :
Application of Retarding Technology to Electron Beam Recorder
Author :
Kobayashi, Masaki ; Kitahara, Hiroaki ; Kojima, Yoshiaki ; Wada, Yasumitsu ; Katsumura, Masahiro ; Iida, Tetsuya
Author_Institution :
Corp. R&D Lab., Pioneer Corp., Saitama
Abstract :
The paper reports the outline of the developed electron beam recorder (EBR) for the purpose of developing future optical disk storage media. A rotation stage is developed and is installed to the EBR. The EBR using the retarding field can vary the beam energy only by adjusting the high voltage for the substrate (10 keV to 50 keV)
Keywords :
electron beam applications; optical disc storage; storage media; electron beam recorder; optical disk storage media; rotation stage; Acceleration; Clamps; Coaxial cables; Connectors; Electron beams; Energy resolution; Particle beams; Resists; Throughput; Voltage;
Conference_Titel :
Optical Data Storage Topical Meeting, 2006
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-9494-1
DOI :
10.1109/ODS.2006.1632738
