Title :
Spiral capacitor based on copper electroplating
Author :
Chen, Yue ; Li, Xiuhan ; Fang, Dongming ; Yuan, Quan ; Zhang, Haixia
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing
Abstract :
A novel MEMS spiral capacitor on glass substrate has been designed, simulated and fabricated. The square spiral capacitors with different width, space, thickness and turn number have been studied by HFSS. The fabrication process has been developed based on copper electroplating, and it is compatible with the copper inductor fabrication process, which can be integrated into LC filter. Finally, spiral capacitors with different dimensions and LC filters have been fabricated successfully.
Keywords :
capacitors; copper; electroplating; micromechanical devices; radiofrequency filters; HFSS; LC filters; MEMS spiral capacitor; copper electroplating; glass substrate; inductor fabrication process; square spiral capacitors; Capacitance; Capacitors; Copper; Fabrication; Filters; Frequency; Glass; Micromechanical devices; Q factor; Spirals; HFSS; Spiral capacitor; copper electroplating; integratable;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068612
