Title :
A cost-effective electrical tracing-assisted silicon microring biosensor
Author :
Song, Junfeng ; Luo, Xianshu ; Tu, Xiaoguang ; Park, Mi Kyoung ; Kee, Jack Sheng ; Zhang, Huijuan ; Yu, Mingbin ; Lo, Guo-Qiang ; Kwong, Dim-Lee
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We propose and demonstrate a cost effective electrical tracing-assisted silicon microring sensor system which comprises one sensing microring and another thermo-optical-tunable tracing microring. Proof-of-principle demonstation by testing polyelectrolyte multilayer shows the sensitivity of 3.75 mW/ng·mm2.
Keywords :
bioMEMS; biosensors; electric sensing devices; elemental semiconductors; microsensors; multilayers; polymer electrolytes; sensitivity; silicon; Si; cost-effective electrical tracing-assisted silicon microring biosensor; polyelectrolyte multilayer testing; proof-of-principle demonstration; sensing microring; sensitivity; thermooptical tunable tracing microring; Biosensors; Optical filters; Optical refraction; Optical resonators; Optical sensors; Optical variables control;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4673-0262-3
