DocumentCode
1957665
Title
A cost-effective electrical tracing-assisted silicon microring biosensor
Author
Song, Junfeng ; Luo, Xianshu ; Tu, Xiaoguang ; Park, Mi Kyoung ; Kee, Jack Sheng ; Zhang, Huijuan ; Yu, Mingbin ; Lo, Guo-Qiang ; Kwong, Dim-Lee
Author_Institution
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2012
fDate
4-8 March 2012
Firstpage
1
Lastpage
3
Abstract
We propose and demonstrate a cost effective electrical tracing-assisted silicon microring sensor system which comprises one sensing microring and another thermo-optical-tunable tracing microring. Proof-of-principle demonstation by testing polyelectrolyte multilayer shows the sensitivity of 3.75 mW/ng·mm2.
Keywords
bioMEMS; biosensors; electric sensing devices; elemental semiconductors; microsensors; multilayers; polymer electrolytes; sensitivity; silicon; Si; cost-effective electrical tracing-assisted silicon microring biosensor; polyelectrolyte multilayer testing; proof-of-principle demonstration; sensing microring; sensitivity; thermooptical tunable tracing microring; Biosensors; Optical filters; Optical refraction; Optical resonators; Optical sensors; Optical variables control;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
Conference_Location
Los Angeles, CA
ISSN
pending
Print_ISBN
978-1-4673-0262-3
Type
conf
Filename
6192013
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