A low-noise CMOS interface circuit for closed-loop accelerometer

Author

Yin, Liang ; Liu, Xiaowei ; Chen, Wei ; Chen, Weiping ; Zhou, Zhiping

Author_Institution

Dept. of Microelectron., Harbin Inst. of Technol., Harbin

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

502

Lastpage

505

Abstract

In this paper, design and characterization of a 18 V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5 pF/g without vacuum packaging. Test results shows that a full scale acceleration of plusmn15 g and a signal bandwidth of 300 Hz is achieved. The complete module operates from a single 18 V supply and has a measured sensitivity of 420 mV/g with a noise of floor of 10 mug/radic(Hz) in closed-loop. The chip is fabricated in the 2 mum two-metal and two-poly n-well CMOS process with an area of 15.2 mm².

Keywords

CMOS integrated circuits; accelerometers; capacitor switching; closed loop systems; integrated circuit design; integrated circuit modelling; integrated circuit noise; bandwidth 300 Hz; chip fabrication; closed-loop accelerometer; low-noise CMOS interface circuit; pendulous silicon accelerometer; size 2 mum; switched-capacitor CMOS design; two-poly n-well CMOS process; voltage 18 V; Accelerometers; Atmosphere; Bandwidth; Circuit testing; Life estimation; Noise measurement; Packaging; Semiconductor device measurement; Silicon; Switching circuits; Closed-loop accelerometer; Inertial sensors; Interface circuit; Switched capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068628

Filename

5068628