Title :
Simulation of the novel micro-valve using dynamic analysis
Author :
Chung, C.K. ; Shih, T.R. ; Wu, B.R.
Abstract :
In this article, the 3D dynamic analysis was used to investigate the geometrical effect on the net flow rate of the novel microvalves in comparison with the conventional nozzle/diffuser microvalves. The novel microvalves with saw-tooth structures had been investigated by 3D transient simulations in order to study the transient flow behavior at different angles. Simulation parameters are half angle alpha, taper angle thetas and excitation frequency f. Simulate results show that net flow rate is dependent on the excitation frequencies. As excitation frequency is higher than 10 Hz, net flow rate decreases with increasing excitation frequency. Net flow rate can also increase with adding circular area and increasing half angle. Better half angle is found at alpha = 6deg. Compared to a conventional nozzle/diffuser microvalve, a novel microvalve with thetas = 9.7deg and alpha = 6deg have the higher net volume flow rate of 0.256 mul/s. Besides, as width of the throat increases, net flow rate will also increase. These results are beneficial for the design of micropumps.
Keywords :
microchannel flow; microfabrication; micropumps; microvalves; transient response; 3D dynamic analysis; 3D transient simulations; conventional nozzle-diffuser microvalve comparison; excitation frequency; microchannel; micropump design; net volume flow rate; saw-tooth structured microvalve design; transient flow behavior; Analytical models; Frequency; Gravity; Microchannel; Micropumps; Microvalves; Numerical simulation; Systems engineering and theory; Valves; Viscosity; diffuser; microvalve; nozzle;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068634