DocumentCode
1958053
Title
Transverse modes suppression and loss reduction for buried electrodes SAW devices
Author
Solal, M. ; Gratier, J. ; Aigner, R. ; Gamble, K. ; Abbott, B. ; Kook, T. ; Chen, A. ; Steiner, K.
Author_Institution
TriQuint Semicond., Apopka, FL, USA
fYear
2010
fDate
11-14 Oct. 2010
Firstpage
624
Lastpage
628
Abstract
High coupling substrates using overcoat layers of silicon oxide for temperature compensation exhibit a strong affinity toward multi-mode behavior. Apodization, which is the standard technique to suppress the transverse modes, suffers from drawbacks such as reduction of the transduction efficiency and additional losses. By changing the transducer layout, the guiding can be improved and a "piston mode" can be obtained. This approach is demonstrated on resonators and DMS test devices manufactured on lithium niobate with an orientation close to YX128 deg.
Keywords
surface acoustic wave resonators; DMS test devices; LiNbO3; apodization technique; buried electrode SAW devices; high coupling substrates; lithium niobate; loss reduction; piston mode resonators; silicon oxide overcoat layers; temperature compensation; transduction efficiency reduction; transverse mode suppression; Acoustics; Apertures; Electrodes; Pistons; Resonant frequency; Shape; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location
San Diego, CA
ISSN
1948-5719
Print_ISBN
978-1-4577-0382-9
Type
conf
DOI
10.1109/ULTSYM.2010.5935738
Filename
5935738
Link To Document