• DocumentCode
    1958053
  • Title

    Transverse modes suppression and loss reduction for buried electrodes SAW devices

  • Author

    Solal, M. ; Gratier, J. ; Aigner, R. ; Gamble, K. ; Abbott, B. ; Kook, T. ; Chen, A. ; Steiner, K.

  • Author_Institution
    TriQuint Semicond., Apopka, FL, USA
  • fYear
    2010
  • fDate
    11-14 Oct. 2010
  • Firstpage
    624
  • Lastpage
    628
  • Abstract
    High coupling substrates using overcoat layers of silicon oxide for temperature compensation exhibit a strong affinity toward multi-mode behavior. Apodization, which is the standard technique to suppress the transverse modes, suffers from drawbacks such as reduction of the transduction efficiency and additional losses. By changing the transducer layout, the guiding can be improved and a "piston mode" can be obtained. This approach is demonstrated on resonators and DMS test devices manufactured on lithium niobate with an orientation close to YX128 deg.
  • Keywords
    surface acoustic wave resonators; DMS test devices; LiNbO3; apodization technique; buried electrode SAW devices; high coupling substrates; lithium niobate; loss reduction; piston mode resonators; silicon oxide overcoat layers; temperature compensation; transduction efficiency reduction; transverse mode suppression; Acoustics; Apertures; Electrodes; Pistons; Resonant frequency; Shape; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2010 IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-0382-9
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2010.5935738
  • Filename
    5935738