DocumentCode
1958105
Title
A Low-Noise Durable Transmissive Stamper for Multi-Layer Discs using Phase Transition Mastering
Author
Aoki, Yukari ; Morita, Kuniyuki ; Deguchi, Kyosuke ; Miyakoshi, Toshimori ; Miyaoka, Yasuyuki ; Hiroki, Tomoyuki ; Koyama, Osamu
fYear
2006
fDate
2006
Firstpage
270
Lastpage
272
Keywords
Aggregates; Atomic force microscopy; Laser transitions; Lithography; Optical films; Resists; Rough surfaces; Sputtering; Substrates; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Data Storage Topical Meeting, 2006
Print_ISBN
0-7803-9494-1
Type
conf
DOI
10.1109/ODS.2006.1632788
Filename
1632788
Link To Document