DocumentCode :
1958105
Title :
A Low-Noise Durable Transmissive Stamper for Multi-Layer Discs using Phase Transition Mastering
Author :
Aoki, Yukari ; Morita, Kuniyuki ; Deguchi, Kyosuke ; Miyakoshi, Toshimori ; Miyaoka, Yasuyuki ; Hiroki, Tomoyuki ; Koyama, Osamu
fYear :
2006
fDate :
2006
Firstpage :
270
Lastpage :
272
Keywords :
Aggregates; Atomic force microscopy; Laser transitions; Lithography; Optical films; Resists; Rough surfaces; Sputtering; Substrates; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical Data Storage Topical Meeting, 2006
Print_ISBN :
0-7803-9494-1
Type :
conf
DOI :
10.1109/ODS.2006.1632788
Filename :
1632788
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1958105
