Title :
Full-wafer loss measurements of silicon ridge waveguides
Author :
Gould, Michael ; Li, Jing ; Baehr-Jones, Tom ; Hochberg, Michael
Author_Institution :
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.
Keywords :
automatic test equipment; integrated optics; loss measurement; optical waveguides; silicon-on-insulator; automated test system; different geometries; full wafer loss measurements; silicon on insulator wafers; silicon ridge waveguides; Couplers; Geometry; Loss measurement; Optical waveguides; Photonics; Silicon; Testing; full wafer; grating coupler; integrated photonics; silicon; waveguide;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053774
