Title :
Deep submicron LOCOS-defined SOI photonic wire waveguides
Author :
Tam, Andrew W. ; Ibrahim, Marc ; Lamontagne, Boris ; Tarr, N. Garry ; Ye, Winnie N. ; Janz, Siegfried ; Xu, Danxia
Author_Institution :
Dept. of Electron., Carleton Univ., Ottawa, ON, Canada
Abstract :
The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.
Keywords :
integrated optics; optical waveguides; silicon-on-insulator; SOI optical waveguides; Si; deep submicron LOCOS-defined SOI photonic wire waveguides; deep submicron dimensions; low-loss photonic wire channel waveguides; Couplers; Optical sensors; Optical surface waves; Optical waveguides; Photonics; Silicon; Wires; LOCOS; SOI waveguides; photonic wire;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053779
