Optimized friction drive controller for a multi-DOF ultrasonic nanopositioner

Author

Ferreira, Antoine ; Fontaine, Jean-Guy

Author_Institution

Lab. Vision et Robotique, Orleans Univ., Bourges, France

Volume

2

fYear

2003

fDate

20-24 July 2003

Firstpage

1315

Abstract

This paper presents a new generation of compliant multidegree of freedom (DOF) piezoelectric nanopositioner for positioning, transport, alignment of microobjects under the field of view of a microscope. It is based on the cooperation of arrayed direct-drive standing wave ultrasonic actuators (microSWUMs). An optimized friction drive multidimensional controller is proposed based on: (i) an electromagnetic field-based preload controller ensuring optimal preload , (ii) an open-loop PWM controller for self-locking and driving force control and (iii) a resonant frequency compensation.

Keywords

force control; friction; nanopositioning; open loop systems; optimisation; piezoelectric devices; ultrasonic devices; degree of freedom; direct drive standing wave ultrasonic actuators; driving force control; electromagnetic field based preload controller; friction drive controller; microobjects alignment; microobjects positioning; microobjects transport; multi-DOF ultrasonic nanopositioner; multidimensional controller; open loop PWM controller; optimal preload; piezoelectric nanopositioner; pulse width modulation; resonant frequency compensation; self locking; Actuators; Electromagnetic fields; Force control; Friction; Microscopy; Multidimensional systems; Nanopositioning; Open loop systems; Optimal control; Pulse width modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on

Print_ISBN

0-7803-7759-1

Type

conf

DOI

10.1109/AIM.2003.1225533

Filename

1225533