Title :
Research on a novel SAW actuator of Floating Electrode Unidirectional Transducer
Author :
Zhang, Junfeng ; Li, YiGui ; Hui, Chun ; Xing, Yumei ; Gao, Yang
Author_Institution :
Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., Shanghai
Abstract :
SAW actuators are required for a micro actuator due to their high output force and direct drive. A new type IDT, Floating Electrode Unidirectional Transducer (FEUDT) is implemented by using MEMS technologies in the paper. The optimal designs were proposed and compared with others in the end. The dimensions of the FEUDT are 5 mm aperture size, 80 mum pitch, 6.7 mum strip width, 0.8 mum thick. In comparison with other types of SAW actuator, FEUDT SAW actuator has higher frequency vibrations and more effectively controllable drive direction.
Keywords :
interdigital transducers; microactuators; surface acoustic wave devices; vibrations; MEMS technologies; SAW actuator; aperture size; direct drive; effectively controllable drive direction; floating electrode unidirectional transducer; frequency vibrations; microactuator; output force; Actuators; Apertures; Electrodes; Frequency; Microactuators; Micromechanical devices; Paper technology; Strips; Surface acoustic waves; Transducers; FEUDT; MEMS; SAW Actuator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068657
