DocumentCode
1958595
Title
SOI digital accelerometer based on pull-in time configuration
Author
Pakula, Lukasz S. ; Rajaraman, Vijayekumar ; French, Patrick J.
Author_Institution
Electron. Instrum. Lab., Delft Univ. of Technol., Delft
fYear
2009
fDate
5-8 Jan. 2009
Firstpage
628
Lastpage
631
Abstract
We aim to present the principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on thin silicon-on-insulator (SOI) substrate. The presented device features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital electronic circuitry. The measurements showed a pull-in voltage of 2.7 V and a pull-in time from 0 to 1 G to be 3.2 mus.
Keywords
accelerometers; digital circuits; microsensors; silicon-on-insulator; SOI digital accelerometer; digital electronic circuitry; pull-in time configuration; pull-in voltage; silicon-on-insulator substrate; time 3.2 mus; voltage 2.7 V; Acceleration; Accelerometers; Circuits; Electrodes; Equations; Fabrication; Microelectromechanical devices; Micromachining; Time measurement; Voltage; MEMS; Thin-SO; digital accelerometer;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location
Shenzhen
Print_ISBN
978-1-4244-4629-2
Electronic_ISBN
978-1-4244-4630-8
Type
conf
DOI
10.1109/NEMS.2009.5068659
Filename
5068659
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