Title :
SOI digital accelerometer based on pull-in time configuration
Author :
Pakula, Lukasz S. ; Rajaraman, Vijayekumar ; French, Patrick J.
Author_Institution :
Electron. Instrum. Lab., Delft Univ. of Technol., Delft
Abstract :
We aim to present the principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on thin silicon-on-insulator (SOI) substrate. The presented device features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital electronic circuitry. The measurements showed a pull-in voltage of 2.7 V and a pull-in time from 0 to 1 G to be 3.2 mus.
Keywords :
accelerometers; digital circuits; microsensors; silicon-on-insulator; SOI digital accelerometer; digital electronic circuitry; pull-in time configuration; pull-in voltage; silicon-on-insulator substrate; time 3.2 mus; voltage 2.7 V; Acceleration; Accelerometers; Circuits; Electrodes; Equations; Fabrication; Microelectromechanical devices; Micromachining; Time measurement; Voltage; MEMS; Thin-SO; digital accelerometer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068659
