DocumentCode
1958635
Title
Advances in piezo-nanopositioning technology
Author
Spanner, Karl ; Vorndran, Shelby
Author_Institution
Phys. Instrum. GmbH & Co. KG., Karlsruhe, Germany
Volume
2
fYear
2003
fDate
20-24 July 2003
Firstpage
1338
Abstract
This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
Keywords
capacitive sensors; digital control; linearisation techniques; nanopositioning; piezoelectric actuators; capacitive sensors; digital control; linearisation techniques; nanotechnology; piezoelectric actuators; piezoelectric nanopositioning technology; Actuators; Biomedical optical imaging; Biotechnology; Ceramics; Microscopy; Nanopositioning; Nanotechnology; Optical polymers; Plastic insulation; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN
0-7803-7759-1
Type
conf
DOI
10.1109/AIM.2003.1225537
Filename
1225537
Link To Document