Title :
Advances in piezo-nanopositioning technology
Author :
Spanner, Karl ; Vorndran, Shelby
Author_Institution :
Phys. Instrum. GmbH & Co. KG., Karlsruhe, Germany
Abstract :
This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.
Keywords :
capacitive sensors; digital control; linearisation techniques; nanopositioning; piezoelectric actuators; capacitive sensors; digital control; linearisation techniques; nanotechnology; piezoelectric actuators; piezoelectric nanopositioning technology; Actuators; Biomedical optical imaging; Biotechnology; Ceramics; Microscopy; Nanopositioning; Nanotechnology; Optical polymers; Plastic insulation; Voltage;
Conference_Titel :
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN :
0-7803-7759-1
DOI :
10.1109/AIM.2003.1225537
