DocumentCode

1958770

Title

Analysis of Silicon Ridge Waveguides for Acoustic Surface Waves

Author

Lagasse, P.E.

Author_Institution

Laboratorium voor Elektromagnetisme en Acustica, University of Ghent, Ghent, Belgium.

Volume

2

fYear

1973

fDate

4-7 Sept. 1973

Firstpage

1

Lastpage

4

Keywords

Acoustic propagation; Acoustic waveguides; Dispersion; Etching; Fabrication; Frequency; Laboratories; Machining; Silicon; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 1973. 3rd European

Conference_Location

Brussels, Belgium

Type

conf

DOI

10.1109/EUMA.1973.331716

Filename

4130328