Title :
Interaction of SAWs with resonating structures on the surface
Author :
Wegert, Henry ; Mayer, Elena A. ; Reindl, Leonhard M. ; Ruile, Werner ; Mayer, Andreas P.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
A simple model is introduced that describes the interaction of surface acoustic waves (SAWs) with a 2D periodic array of objects on the surface that give rise to internal resonances. Such objects may be high-aspect ratio structures like micro-pillars fabricated of a material different from that of the substrate. The model allows for an approximate determination of the band structure for the acoustic modes in such systems. Results are presented for the dependence on structural parameters of a total bandgap in the non-radiative regime of a semi-infinite substrate, and it is shown how the frequency and radiation damping of vibrational modes can be determined that are associated with defects in the periodic 2D array.
Keywords :
band structure; substrates; surface acoustic wave devices; 2D periodic array; SAW; band structure; high-aspect ratio structures; internal resonance; micropillars; nonradiative regime; periodic 2D array; radiation damping; resonating structures; semiinfinite substrate; structural parameters; surface acoustic waves; vibrational modes; Acoustics; Arrays; Dispersion; Lattices; Mathematical model; Oscillators; Substrates; 2D; SAW; bandgap; periodic structures; phononic crystals;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935772