Title :
Langasite SAW device with gas-sensitive layer
Author :
Zheng, Peng ; Chin, Tao-Lun ; Greve, David ; Oppenheim, Irving ; Malone, Vanessa ; Ashok, Tejasvi ; Miller, James ; Cao, Limin
Author_Institution :
Nat. Energy Technol. Lab., Pittsburgh, PA, USA
Abstract :
High temperature langasite SAW oxygen sensors using ZnO as a resistive sensing layer were fabricated and tested in a wired configuration up to 650°C, representing an important step toward future high temperature wireless sensor development. ZnO layers deposited by spin coating and RF sputtering methods were compared. The langasite SAW sensor with spin coated ZnO sensing film had strongly increasing surface wave attenuation from 100°C to 250°C and undetectable reflections above 250°C. The langasite SAW gas sensor with sputtered ZnO sensing film showed clear oxygen gas flow response from 500°C to 650°C.
Keywords :
gas sensors; spin coating; sputtering; surface acoustic wave sensors; zinc compounds; RF sputtering methods; ZnO; gas-sensitive layer; high temperature wireless sensor develop¬ ment; langasite SAW device; oxygen sensors; resistive sensing layer; spin coating; temperature 100 degC to 250 degC; temperature 500 degC to 650 degC; Gas detectors; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Zinc oxide; high temperature; langasite; oxygen sensor; spin coating; sputtering; surface scoustic wave; zinc oxide;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935779
