A backstepping controller for piezoelectric actuators with hysteresis in nanopositioning

Author

Payam, A.F. ; Fathipour, Morteza ; Yazdanpanah, Mohammad Java

Author_Institution

Device Modelling & Simulation Lab., Univ. of Tehran, Tehran

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

711

Lastpage

716

Abstract

High precision control and hysteresis compensation are two important factors in nanopositioning. To reduce the tracking error and compensate the hysteresis effect in the piezoelectric actuator, in this paper we present a nanopositioning control scheme for piezoelectric platform. A Bouc-Wen model is established to describe the nonlinear hysteretic effect of the piezoelectric systems. The design of a backstepping controller is explained and its performance is compared with traditional closed loop PID controller.

Keywords

control system synthesis; hysteresis; nanopositioning; piezoelectric actuators; Bouc-Wen model; backstepping controller design; error tracking reduction; nanopositioning control factor scheme; nonlinear hysteretic effect; piezoelectric actuator; traditional closed loop PID controller; Backstepping; Computational modeling; Computer simulation; Control systems; Error correction; Hysteresis; Nanopositioning; Piezoelectric actuators; Piezoelectric materials; Three-term control; Backstepping control; Nanopositioning; Piezoelectric Actuator; hysteretic effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068678

Filename

5068678