Title :
NEMS-based optical phase modulator fabricated on Silicon-On-Insulator
Author :
Van Acoleyen, Karel ; Roels, Joris ; Claes, Tom ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9μm long slot waveguide an optical phase change of 60° was observed.
Keywords :
electro-optical modulation; nanoelectromechanical devices; silicon-on-insulator; NEMS-based optical phase modulator; silicon-on-insulator; size 9 mum; under-etched slot waveguide; voltage 15 V; Integrated optics; Optical sensors; Optical waveguides; Photonics; Stimulated emission; Waveguide transitions;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053820
