Title :
Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films
Author :
Yanagitani, Takahiko ; Arakawa, Kazuki ; Kano, Kazuhiko ; Teshigahara, Akihiko ; Akiyama, Morito
Author_Institution :
Grad. Sch. of Eng., Nagoya Inst. of Technol., Nagoya, Japan
Abstract :
Giant shear mode electromechanical coupling coeficient k15´ of 0.32 (k152=10%) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600°C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.
Keywords :
III-V semiconductors; aluminium compounds; high-temperature effects; piezoelectricity; scandium compounds; semiconductor thin films; wide band gap semiconductors; ScAlN; c-axis tilted thin films; giant shear mode electromechanical coupling coefficient; high temperature effects; nondoped crystal; piezoelectricity; temperature 600 degC; temperature coefficients of frequency; Couplings; Film bulk acoustic resonators; Films; Temperature; Temperature measurement; Zinc oxide; AlN film; BAW resonator; Electromechanical coupling coefficient; FBAR; ScAlN film; TCF; Thickness shear mode;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935791
