A solenoid-type inductor with Fe-based soft magnetic thin film for high frequency application

Author

Xiao-Yu Gao ; Wen Ding ; Zhou, Yong ; Lei, Chong ; Cao, Ying ; Choi, Hyung

Author_Institution

Inst. of Micro & Nano Sci. & Technol., Shanghai Jiao Tong Univ.

fYear

0

fDate

0-0 0

Firstpage

74

Lastpage

74

Abstract

Soft FeSiBCuNbCr magnetic thin film was deposited by magnetron sputtering as magnetic core for inductor. In the fabrication process, UV-LIGA, dry etching technique, fine polishing and electroplating technique are adopted. The size of the solenoid-type inductor is 3.9 mm times 2.66 mm. Experimental results show that the inductance keeps constant about 0.9 muH in the frequency range from 1 MHz to 10 MHz, and the maximum quality factor is 2.5 at 9 MHz

Keywords

LIGA; boron alloys; chromium alloys; copper alloys; electroplating; etching; inductors; iron alloys; magnetic cores; magnetic thin films; niobium alloys; polishing; silicon alloys; solenoids; sputtering; 1 to 10 MHz; FeSiBCuNbCr; UV-LIGA; dry etching technique; electroplating technique; fabrication process; fine polishing; inductor; magnetic core; magnetron sputtering; soft magnetic thin film; solenoid-type inductor; Dry etching; Fabrication; Frequency; Inductance; Magnetic cores; Magnetic films; Q factor; Soft magnetic materials; Sputtering; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electromagnetic Field Computation, 2006 12th Biennial IEEE Conference on

Conference_Location

Miami, FL

Print_ISBN

1-4244-0320-0

Type

conf

DOI

10.1109/CEFC-06.2006.1632866

Filename

1632866