Title :
Horizontal Cu/SiO2/Si/SiO2/Cu plasmonic waveguide components integrated in silicon photonic circuits
Author :
Zhu, Shiyang ; Chee, J.Y. ; Lo, G.Q. ; Bai, P. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We report experimental realization of various Cu/SiO2/Si/SiO2/Cu plasmonic waveguide based building blocks, including low loss (~0.28 dB/Lim) waveguides, low loss (~0.52 dB/turn) bends, power splitters, and Mach-Zehnder interferometers with ER of ~18.7 dB. This is a significant step toward plasmonic nanocircuits on the Si platform.
Keywords :
Mach-Zehnder interferometers; copper; integrated optics; nanophotonics; optical beam splitters; optical losses; optical waveguides; plasmonics; silicon; silicon compounds; Cu-SiO2-Si-SiO2-Cu; Mach-Zehnder interferometers; Si; low loss bends; low loss waveguides; nanocircuits; plasmonic nanocircuits; plasmonic waveguide components; power splitters; silicon photonic circuits; Copper; Loss measurement; Optical losses; Optical waveguides; Plasmons; Propagation losses; Silicon;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2012 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4673-0262-3
