Title :
The development of piezoelectric biosensor based on nano-crystalline PZT/quarts
Author :
Hou, Anzhou ; Ni, Henan ; Hui, Chun ; Xu, Ailan
Author_Institution :
Coll. of Life Sci. Biotechnol., Shanghai Jiaotong Univ., Shanghai
Abstract :
A novel piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer cells detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results show that the PZT films feature (101) preferred orientation, perovskite crystal structure, smooth surface, and the crystal particle size is 20-30 nm.The sensitivity of biosensor based on nano-crystalline PZT/quartz structure is improved.
Keywords :
X-ray diffraction; atomic force microscopy; biomedical measurement; biosensors; cancer; cellular biophysics; crystal structure; lead compounds; microbalances; nanofabrication; nanosensors; nanostructured materials; particle size; piezoelectric devices; piezoelectric thin films; quartz; sol-gel processing; texture; thin film sensors; tumours; AFM; PZT-SiO2; SiO2; XRD; cancer cell detection; crystal particle size; microstructure; nanocrystalline PZT-quartz structure; nanofabrication; perovskite crystal structure; piezoelectric microbalance biosensor; preferred orientation; size 20 nm to 30 nm; smooth surface; sol-gel method; thin films; Anti-freeze; Biosensors; Bonding; Lead; Piezoelectric films; Powders; Resonant frequency; Substrates; Temperature sensors; Zirconium; biosensors; cancer cells; nano-crystalline; quartz;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068725
