Title :
Electrical stress on film resistive structures on different substrates
Author :
Bonfert, Detlef ; Klink, Gerhard ; Bock, Karlheinz ; Svasta, Paul ; Ionescu, Ciprian
Author_Institution :
Fraunhofer Instn. for Modular Solid State Technol. (EMFT), Munich, Germany
Abstract :
One of the most important issues of resistors properties is the value stability under different electrical and non electrical influences. Mechanical and/or thermal stress together with the electrical one represent the main factors that have a major contribution in resistor value stability. With highly isolating and/or flexible substrates the devices become also susceptible to electrical stress, like for example Electro Static Discharge (ESD). In order to investigate the behavior at high current densities, a pulsed measurement technique was applied to the film resistive structures on different substrates. The analytical test technique of Transmission Line Pulsers (TLP) allows, on the basis of square pulses, the in-situ monitoring of the voltages and currents at the Device Under Test (DUT) during pulsing and helps to gain fundamental insights into the electrical behavior at higher current densities. In this work the analysis is made comparing thick- and thin- film resistors on different, rigid and flexible substrates, with single and multiple pulsing, showing the common behavior before, during and after pulsing.
Keywords :
electrostatic discharge; resistors; substrates; thermal stresses; analytical test technique; device under test; electrical stress; electro static discharge; film resistive structures; flexible substrates; mechanical stress; resistor value stability; resistors properties; thermal stress; thick-film resistors; thin-film resistors; transmission line pulsers; Electrical resistance measurement; Pulse measurements; Resistance; Resistors; Semiconductor device measurement; Thick films; Voltage measurement;
Conference_Titel :
Electronics Technology (ISSE), 2011 34th International Spring Seminar on
Conference_Location :
Tratanska Lomnica
Print_ISBN :
978-1-4577-2111-3
DOI :
10.1109/ISSE.2011.6053879