Title :
An integrated solenoid-type inductor with electroplated Ni-Fe magnetic core
Author :
Gao, Xiao-Yu ; Ding, Wen ; Zhou, Yong ; Lei, Chong ; Cao, Ying ; Choi, Hyung
Author_Institution :
Inst. of Micro & Nano Sci. & Technol., Shanghai Jiao Tong Univ.
Abstract :
This paper reports a technological process that combines copper as conductor, NiFe film as magnetic core and polyimide as insulation material to complete a solenoid-type inductor. The results show that the inductance is 5.4 muH at 1 MHz and it keeps high inductance of 2 muH at 10 MHz. The quality factor is 1.54 at 1 MHz and up to 1.9 at 7 MHz
Keywords :
Q-factor; conductors (electric); copper; electroplated coatings; inductors; iron alloys; magnetic cores; magnetic thin films; metallic thin films; nickel alloys; polymer insulators; solenoids; 1 MHz; 10 MHz; 7 MHz; NiFe; electroplated magnetic core; film; insulation material; integrated solenoid-type inductor; polyimide; quality factor; Conducting materials; Conductive films; Copper; Inductance; Inductors; Insulation; Magnetic cores; Magnetic films; Magnetic materials; Polyimides;
Conference_Titel :
Electromagnetic Field Computation, 2006 12th Biennial IEEE Conference on
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0320-0
DOI :
10.1109/CEFC-06.2006.1632930
