fDate :
Aug. 12 2007-July 16 2007
Abstract :
The following topics are dealt with: medical and bio sensing; active nano devices; novel fabrication techniques; bio nano devices; actuation; microlenses; micro and nano lithography; spectroscopy; tunable devices; nanofabrication; and micromirrors.
Keywords :
biosensors; lithography; micro-optomechanical devices; microlenses; micromirrors; nanobiotechnology; nanoparticles; nanotechnology; optical fabrication; optical tuning; spectroscopy; active nano devices; actuation; bio nano devices; bio sensing; fabrication techniques; medical sensing; micro lithography; microlenses; micromirrors; nano lithography; nanofabrication; nanophotonics; optical MEMS; spectroscopy; tunable devices;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373803
