Tunable Endoscopic MEMS-Probe for Optical Coherence Tomography

Author

Aljasem, K. ; Werber, A. ; Zappe, H.

Author_Institution

Univ. of Freiburg, Freiburg

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

8

Lastpage

9

Abstract

A novel miniaturized tunable endoscopic MEMS probe employable in an endoscopic optical coherence tomography (OCT) system is presented. The probe consists of a pneumatically-actuated micro-lens and a GRIN lens coupled to an optical fiber. Silicon micromachining using polydimethylsiloxane was used to fabricate the lens. The probe has a diameter of 5 mm. The successful integration of the tunable endoscopic probe with an OCT imager promises to be of value in medical diagnostics, particularly for the early detection of internal tumors and cancers.

Keywords

bioMEMS; biomedical optical imaging; cancer; endoscopes; fibre optic sensors; gradient index optics; micro-optomechanical devices; microlenses; micromachining; optical fabrication; optical tomography; tumours; GRIN lens; cancers; internal tumors; medical diagnostics; optical coherence tomography; optical fiber; pneumatically-actuated microlens; polydimethylsiloxane; silicon micromachining; size 5 mm; tunable endoscopic MEMS-probe; Biomedical optical imaging; Lenses; Medical diagnosis; Micromachining; Micromechanical devices; Optical coupling; Optical fibers; Probes; Silicon; Tomography; Endoscopic optical coherence tomography; Tunable MEMS probe; micro-lens; polydimethylsiloxane (PDMS);

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373813

Filename

4373813