Title :
The MESA institute-a university partnership program for microsystems
Author :
Stinnett, Richard
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
30 June-2 July 2003
Abstract :
The U.S. Department of Energy´s MESA Project is creating extensive, unique microsystems facilities and infrastructure at Sandia National Laboratories that can be accessed by U.S. Universities through Sandia´s MESA Institute.
Keywords :
micromechanical devices; project engineering; MESA institute; MESA project; Sandia national laboratories; US Department of Energy; microsystems; microsystems and engineering science applications; university partnership program; Costs; Industrial relations; Laboratories; National security; Pipelines; Power engineering and energy; Remuneration; Semiconductor device packaging; Semiconductor materials; Silicon;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
Print_ISBN :
0-7803-7972-1
DOI :
10.1109/UGIM.2003.1225688
