DocumentCode
1961568
Title
Towards the Fabrication Platforms for MOEMS
Author
Fang, Wanliang
fYear
2007
fDate
Aug. 12 2007-July 16 2007
Firstpage
23
Lastpage
24
Abstract
Fabrication platform is one of the key factors to accelerate the progress of MOEMS (micro opto-electro-mechanical systems). The two poly-Si MUMPs process is recognized as one of the most popular fabrication platforms for MOEMS. This study intends to introduce three fabrication platforms evolved from MUMPs to improve the performances of MOEMS devices.
Keywords
elemental semiconductors; micro-optomechanical devices; optical fabrication; silicon; MOEMS; Si - Interface; fabrication platforms; microoptoelectromechanical systems; poly-Si MUMPs process; Actuators; Electrodes; Etching; Fabrication; Lenses; Mirrors; Optical films; Polymers; Silicon; Springs; Fabrication platform; MOSBE process; MUMPs process;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location
Hualien
Print_ISBN
978-1-4244-0641-8
Type
conf
DOI
10.1109/OMEMS.2007.4373821
Filename
4373821
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