Title :
Towards the Fabrication Platforms for MOEMS
fDate :
Aug. 12 2007-July 16 2007
Abstract :
Fabrication platform is one of the key factors to accelerate the progress of MOEMS (micro opto-electro-mechanical systems). The two poly-Si MUMPs process is recognized as one of the most popular fabrication platforms for MOEMS. This study intends to introduce three fabrication platforms evolved from MUMPs to improve the performances of MOEMS devices.
Keywords :
elemental semiconductors; micro-optomechanical devices; optical fabrication; silicon; MOEMS; Si - Interface; fabrication platforms; microoptoelectromechanical systems; poly-Si MUMPs process; Actuators; Electrodes; Etching; Fabrication; Lenses; Mirrors; Optical films; Polymers; Silicon; Springs; Fabrication platform; MOSBE process; MUMPs process;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373821
