FR-4 as a New MOEMS Platform

Author

Holmstrom, S. ; Yalcinkaya, A.D. ; Isikman, A. ; Ataman, C. ; Urey, H.

Author_Institution

Koc Univ., Istanbul

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

25

Lastpage

26

Abstract

FR4 is a well-engineered material and widely used in the PCB industry and lend itself to high degree of integration of optoelectronic, micro-optic, and electronic devices. FR4 is used for the first time as an actuated mechanical device that integrates several functions on the same device. Two different approaches to 2D laser scanning using a single electromagnetic actuation coil and application to Fourier Transform spectroscopy are presented; many other applications can be envisioned.

Keywords

Fourier transform spectroscopy; Michelson interferometers; electromagnetic actuators; micro-optomechanical devices; microactuators; optical materials; optical scanners; 2D laser scanning; FR4; Fourier tansform spectroscopy; MOEMS; PCB; actuated mechanical device; interferometers; single electromagnetic actuation coil; Actuators; Coils; Educational institutions; Fabrication; Interferometers; Magnetic separation; Mirrors; Optical materials; Soft magnetic materials; Spectroscopy; electromagnetic actuators; interferometers; scanners;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373822

Filename

4373822