Title :
FR-4 as a New MOEMS Platform
Author :
Holmstrom, S. ; Yalcinkaya, A.D. ; Isikman, A. ; Ataman, C. ; Urey, H.
Author_Institution :
Koc Univ., Istanbul
fDate :
Aug. 12 2007-July 16 2007
Abstract :
FR4 is a well-engineered material and widely used in the PCB industry and lend itself to high degree of integration of optoelectronic, micro-optic, and electronic devices. FR4 is used for the first time as an actuated mechanical device that integrates several functions on the same device. Two different approaches to 2D laser scanning using a single electromagnetic actuation coil and application to Fourier Transform spectroscopy are presented; many other applications can be envisioned.
Keywords :
Fourier transform spectroscopy; Michelson interferometers; electromagnetic actuators; micro-optomechanical devices; microactuators; optical materials; optical scanners; 2D laser scanning; FR4; Fourier tansform spectroscopy; MOEMS; PCB; actuated mechanical device; interferometers; single electromagnetic actuation coil; Actuators; Coils; Educational institutions; Fabrication; Interferometers; Magnetic separation; Mirrors; Optical materials; Soft magnetic materials; Spectroscopy; electromagnetic actuators; interferometers; scanners;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373822
