Title :
Integration of SoC and LOC
Author_Institution :
National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Abstract :
The System-on-a-Chip (SoC) exhibits great promise in the world of microelectronics, while LOC (Lab-on-a-Chip) contributes a great progress for biochemical research. A combination of the semiconductor integrated SoC with LOC is brought in this presentation. We propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A Post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.
Keywords :
Biological systems; CMOS technology; Electronic circuits; Integrated circuit technology; Lab-on-a-chip; Microelectronics; Microfluidics; Micromechanical devices; Monolithic integrated circuits; System-on-a-chip;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen, China
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068791
