CNT-based extreme low-power micro motion sensors

Based on DEP manipulation of CNTs, our group has, in the past few years, systematically developed a time-efficient approach to engineer CNT based sensors, i.e., only ∼1sec is required per CNT sensing element. Some examples of CNT devices fabricated with this technology includes MEMS pressure sensors, chemical sensors, and flow shear stress sensors. In this talk, we will focus our discussion on the development of CNT-based inclination and acceleration sensors for motion detection. The most important factor for investigating CNTs as next generation sensing elements is that they may provide ∼1000 times of reduction in activation power (i.e., ∼μW range) requirement than conventional MEMS sensors.