Bi-directionally Driven Metal Cantilevers Developed for Optical Actuation

Author

Kwon, H. ; Nakada, M. ; Hirabayashi, Y. ; Higo, A. ; Ataka, M. ; Fujita, H. ; Toshiyoshi, H.

Author_Institution

Kanagawa Acad. of Sci. & Technol., Kawasaki

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

49

Lastpage

50

Abstract

In this paper we report a silicon solar-cell array to generate voltage (about 4.8 V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator was developed by using the reverse sputtering process to minimize the performance variation associated with the patterning error. The bi-directional actuator was developed for potential use in AFM-based data storage.

Keywords

cantilevers; chromium; electrostatic actuators; gold; micro-optics; p-i-n diodes; silicon-on-insulator; solar cell arrays; sputtering; Cr-Au-Cr; PIN diode; SOI wafer; bidirectional actuator; bidirectionally driven metal cantilevers; chromium-gold-chromium layers; electro-thermal pull-up motion; electrostatic pull-down motion; epitaxial growth; metal cantilever actuator; optical actuation; reverse sputtering process; silicon PIN layer; silicon solar-cell array; silicon-on-insulator wafer; Atomic force microscopy; Bidirectional control; Chromium; Gold; Photovoltaic cells; Semiconductor laser arrays; Silicon; Sputter etching; Sputtering; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373834

Filename

4373834