Title :
Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer
Author :
Kant, R. ; Garmire, D. ; Choo, H. ; Muller, R.S.
Author_Institution :
Univ.Stanford, Stanford
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We describe and present detailed performance characterizations for an enhanced version of our MEMS based phase shifting interferometer (MBPSI) that achieves times denser motion reconstruction at an our original system. We measure the noise level to be lesplusmn6 nm lambda for a 66 nm laser) and the frequency resolution to be les Hz for Hz motion captured at Hz. We have successfully tracked a piezo based actuator driven with an arbitrary waveform composed of transients les Hz.
Keywords :
light interferometers; micro-optomechanical devices; microsensors; phase shifting interferometry; piezoelectric actuators; MBPSI; MEMS-based phase-shifting interferometer; arbitrary waveform; motion reconstruction; piezoactuator; wavelength 66 nm; Actuators; Image reconstruction; Laser noise; Micromechanical devices; Mirrors; Motion measurement; Noise level; Noise measurement; Optical interferometry; Phase shifting interferometry; Phase-shifting; interferometer; optical MEMS; transient motion;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373838
