Title :
Laser Doppler Vibrometer Using a 45°-angled Optical Fiber for In-plane Dynamic Measurement of MEMS Actuators
Author :
Kim, Man Geun ; Jo, Kyoungwoo ; Park, Youngsik ; Jang, Wongun ; Lee, Jong-Hyun
Author_Institution :
Gwangju Inst. of Sci. and Technol. (GIST), Gwangju
fDate :
Aug. 12 2007-July 16 2007
Abstract :
A FOLDV (fiber optic laser doppler vibrometer) using a 45deg-angled optical fiber with a self-aligned micro lens can be used to measure the in-plane dynamic motion of microstructure that does not allow optical access in sidewall direction. This system features a good immunity to external disturbance and easy alignment of optical components during system assembly. The performance of the proposed fiber-based vibrometer is evaluated in terms of signal stability, and compared with other type of LDV.
Keywords :
Doppler measurement; fibre optic sensors; measurement by laser beam; microactuators; microlenses; vibration measurement; MEMS actuators; fiber optic laser Doppler vibrometer; in-plane dynamic measurement; optical fiber; self-aligned microlens; signal stability; Actuators; Assembly systems; Fiber lasers; Lenses; Micromechanical devices; Microstructure; Motion measurement; Optical devices; Optical fibers; Vibrometers; 45° Angled optical fiber; Micro lens; Vibrometer; in-plane motion;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373841
