Laser Doppler Vibrometer Using a 45Â°-angled Optical Fiber for In-plane Dynamic Measurement of MEMS Actuators

Author

Kim, Man Geun ; Jo, Kyoungwoo ; Park, Youngsik ; Jang, Wongun ; Lee, Jong-Hyun

Author_Institution

Gwangju Inst. of Sci. and Technol. (GIST), Gwangju

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

63

Lastpage

64

Abstract

A FOLDV (fiber optic laser doppler vibrometer) using a 45deg-angled optical fiber with a self-aligned micro lens can be used to measure the in-plane dynamic motion of microstructure that does not allow optical access in sidewall direction. This system features a good immunity to external disturbance and easy alignment of optical components during system assembly. The performance of the proposed fiber-based vibrometer is evaluated in terms of signal stability, and compared with other type of LDV.

Keywords

Doppler measurement; fibre optic sensors; measurement by laser beam; microactuators; microlenses; vibration measurement; MEMS actuators; fiber optic laser Doppler vibrometer; in-plane dynamic measurement; optical fiber; self-aligned microlens; signal stability; Actuators; Assembly systems; Fiber lasers; Lenses; Micromechanical devices; Microstructure; Motion measurement; Optical devices; Optical fibers; Vibrometers; 45Â° Angled optical fiber; Micro lens; Vibrometer; in-plane motion;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373841

Filename

4373841