A Two-Axis MEMS Scanner Driven by Radial Vertical Combdrive Actuators

Author

Chiou, Sheng-Jie ; Hsieh, Tien-liang ; Tsai, Jui-che ; Sun, Chia-Wei ; Hah, Dooyoung ; Wu, Ming C.

Author_Institution

Nat. Taiwan Univ., Taipei

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

83

Lastpage

84

Abstract

We report a two-axis MEMS scanner driven by radial vertical combdrive actuators. The device is fabricated by a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is designed to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Mechanical rotation angles of plusmn5.4deg at 42 V and plusmn2.4deg at 63 V are obtained for rotation about the lower and upper springs, respectively.

Keywords

microactuators; micromachining; optical scanners; cross-bar spring structure; dual-axis rotation; five-layer polysilicon; lower torsion springs; radial vertical combdrive actuators; surface micromachining; two-axis MEMS scanner; upper torsion springs; voltage 42 V; voltage 63 V; Biomedical engineering; Biomedical imaging; Computer industry; Electrooptic devices; Electrostatic actuators; Industrial electronics; Micromachining; Micromechanical devices; Mirrors; Springs; Two-axis scanner; radial comb-drive actuators; small form factor; surface micromachining;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373851

Filename

4373851