DocumentCode
1962164
Title
A full-wave model of a piezo-electric fluid sensor using lateral field excitation
Author
Brunnmaier, Thomas Voglhuber ; Jakoby, Bernhard
Author_Institution
Inst. for Microelctronics & Microsensors, Johannes Kepler Univ., Linz, Austria
fYear
2010
fDate
11-14 Oct. 2010
Firstpage
744
Lastpage
747
Abstract
In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full-wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.
Keywords
dielectric liquids; electrodes; finite element analysis; piezoelectric devices; sensors; FEM; electric field distribution; electrodes; full-wave fashion; full-wave model; lateral field excitation; layered structure; mass loading effect; modeling approach; perturbation method; piezoelectric disc; piezoelectric fluid sensor; spectral domain; Admittance; Electric potential; Electrodes; Materials; Mathematical model; Resonant frequency; Spectral analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location
San Diego, CA
ISSN
1948-5719
Print_ISBN
978-1-4577-0382-9
Type
conf
DOI
10.1109/ULTSYM.2010.5935924
Filename
5935924
Link To Document