• DocumentCode
    1962164
  • Title

    A full-wave model of a piezo-electric fluid sensor using lateral field excitation

  • Author

    Brunnmaier, Thomas Voglhuber ; Jakoby, Bernhard

  • Author_Institution
    Inst. for Microelctronics & Microsensors, Johannes Kepler Univ., Linz, Austria
  • fYear
    2010
  • fDate
    11-14 Oct. 2010
  • Firstpage
    744
  • Lastpage
    747
  • Abstract
    In the presented work a piezoelectric fluid sensor featuring both electrodes on one face of the piezoelectric disc (LFE electrode arrangement) is efficiently modeled as a layered structure in the spectral domain. The interaction of piezoelectric disc and sample liquid, which is not fully manageable in an analytical way or too comprehensive for FEM, is modeled in a full-wave fashion by the method. In this contribution, the modeling approach is demonstrated and the mass loading effect of the electrodes is accounted for by a perturbation method. Furthermore the electric field distribution within the sensor is illustrated.
  • Keywords
    dielectric liquids; electrodes; finite element analysis; piezoelectric devices; sensors; FEM; electric field distribution; electrodes; full-wave fashion; full-wave model; lateral field excitation; layered structure; mass loading effect; modeling approach; perturbation method; piezoelectric disc; piezoelectric fluid sensor; spectral domain; Admittance; Electric potential; Electrodes; Materials; Mathematical model; Resonant frequency; Spectral analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2010 IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-0382-9
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2010.5935924
  • Filename
    5935924