DocumentCode :
1962227
Title :
Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication Wavelengths
Author :
Bulgan, E. ; Kanamori, Y. ; Hane, K.
Author_Institution :
Tohoku Univ., Sendai
fYear :
2007
fDate :
Aug. 12 2007-July 16 2007
Firstpage :
93
Lastpage :
94
Abstract :
We report a mechanical-contact-based single-input single-output normally-closed optical microswitch. The switch comprises an input and an identical output waveguide, and a movable low-loss elliptical waveguide driven by a miniature electrostatic comb drive. Movable waveguide closes the lateral gap between input and output waveguides. Mechanical contact of waveguide tip surfaces enables light propagation from the input to the output waveguide through movable elliptical waveguide. Optical property of the switch is studied by finite difference time domain (FDTD) analysis. An SOI wafer with 260 nm-thick device-Si and 2 mum-thick buried-oxide layers is utilized in the fabrication. TE-polarized near infrared light at 1.55 mum wavelength is coupled into the input waveguide through an IR objective lens in free-space, and switch is observed with the help of a vidicon camera. Approximately 30plusmn2 dB switching contrast is obtained experimentally at 540 nm lateral switch motion between on and off states.
Keywords :
buried layers; finite difference time-domain analysis; light propagation; mechanical contact; micro-optics; microswitches; optical communication equipment; optical switches; optical waveguides; silicon-on-insulator; FDTD analysis; SOI wafer; Si; buried-oxide layers; electrostatic comb drive; elliptical waveguide; finite difference time domain analysis; identical output waveguide; input waveguides; light propagation; mechanical contact; normally-closed optical microswitch; output waveguides; single-input single-output optical microswitch; size 2 mum; size 260 nm; submicron-Si-waveguide; telecommunication wavelengths; wavelength 1.55 mum; wavelength 540 nm; Contacts; Electrostatics; Finite difference methods; Microswitches; Optical switches; Optical waveguides; Surface waves; Telecommunication switching; Time domain analysis; Waveguide discontinuities; Optical microswitch; mechanical contact; single mode; submicron waveguide; telecommunication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
Type :
conf
DOI :
10.1109/OMEMS.2007.4373856
Filename :
4373856
Link To Document :
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