Title :
A MEMS-based Organic Deformable Mirror with Tunable Focal Length
Author :
Chen, Tyng-Yow ; Li, Chao-Hu ; Wang, Jen-Liang ; Chiu, Chen-Wei E. ; Su, Guo-Dung J.
Author_Institution :
Nat. Taiwan Univ., Taipei
fDate :
Aug. 12 2007-July 16 2007
Abstract :
In this paper, we present a deformable mirror with circular membrane combined with single transparent electrode which can used as concave or convex mirrors. The membrane is made by organic material to achieve large deformation is actuated by electrostatic force. The mirror´s focal length is adjustable by tuning the applied voltage. The beam diameter can be shrunk to 1/3 of original diameter when the focal length is adjusted to 87 mm. The fabrication process, mirror´s tunable range, and experiment result will be discussed in this article.
Keywords :
micromechanical devices; micromirrors; MEMS-based deformable mirror; circular membrane; concave mirrors; convex mirrors; electrostatic force; organic deformable mirror; single transparent electrode; tunable focal length; Biomembranes; Chromium; Delta modulation; Dry etching; Electrostatics; Equations; Mirrors; Optical attenuators; Silicon; Tunable circuits and devices; Optical MEMS; deformable mirror; focal length; polyimide;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373861
