A resistor-based temperature sensor for MEMS frequency references

Author

Shahmohammadi, M. ; Souri, K. ; Makinwa, Kofi A. A.

Author_Institution

Electron. Instrum. Lab., Delft Univ. of Technol., Delft, Netherlands

fYear

2013

fDate

16-20 Sept. 2013

Firstpage

225

Lastpage

228

Abstract

This paper presents a CMOS temperature sensor intended for the temperature compensation of MEMS frequency references. It is based on a Wien bridge RC filter, whose phase-shift, due to the temperature dependency of the resistors used, is temperature dependent. This phase shift is then digitized by a phase domain sigma-delta modulator. The sensor was implemented in 0.18μm CMOS, consumes 36 μW and achieves 6mK resolution in a conversion time of 100msec. After batch calibration and a 3-point trim, it achieves ±0.15°C (3σ) inaccuracy over the industrial range (-40°C to 85°C).

Keywords

CMOS integrated circuits; RC circuits; calibration; compensation; microsensors; phase shifters; resistors; sigma-delta modulation; temperature sensors; CMOS temperature sensor; MEMS frequency references; Wien bridge RC filter; calibration; phase domain sigma-delta modulator; power 36 muW; resistor-based temperature sensor; size 0.18 mum; temperature -40 degC to 85 degC; temperature compensation; temperature dependent phase-shift; time 100 ms;

fLanguage

English

Publisher

ieee

Conference_Titel

ESSCIRC (ESSCIRC), 2013 Proceedings of the

Conference_Location

Bucharest

ISSN

1930-8833

Print_ISBN

978-1-4799-0643-7

Type

conf

DOI

10.1109/ESSCIRC.2013.6649113

Filename

6649113