Fabrication of a silicon micro-scalpel with a nanometer cutting edge

A silicon micro-scalpel with a nanometer cutting edge bas been fabricated. The fabrication process involves only one mask, and uses RIE, DRIE, and SEG processes. The resulting scalpel is an order of magnitude smaller than any micro-scalpels currently in production. It offers benefits of reduced cost, reduced surface roughness, sharper cutting edges, and blade facets for reduction of tissue or cell tearing. Other structures, such as a micro-probe with a nanometer cutting tip, have also been fabricated using the same process.