DocumentCode
1962784
Title
Bulk micromachined pressure sensor
Author
Fuller, Lynn F. ; Sudirgo, Steven
Author_Institution
Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
2003
fDate
30 June-2 July 2003
Firstpage
317
Lastpage
320
Abstract
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
Keywords
electric sensing devices; microsensors; piezoresistive devices; pressure sensors; MEMS device fabrication; educational tool; micromachined piezoresistive pressure sensor; pressure sensor design; pressure sensor packaging; CMOS technology; Etching; Fabrication; Mechanical sensors; Microelectronics; Piezoresistance; Resistors; Sensor arrays; Space technology; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
ISSN
0749-6877
Print_ISBN
0-7803-7972-1
Type
conf
DOI
10.1109/UGIM.2003.1225752
Filename
1225752
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