Title :
Growth of Li2B4O7 films on LiNbO3 and LiTaO3 substrates
Author :
Uno, Toru ; Mutoh, S.
Author_Institution :
Dept. Electr. & Electron. Eng., Kanagawa Inst. of Technol., Atsugi, Japan
Abstract :
Lithium niobate (LiNbO3: LN) and lithium tantalate (LiTaO3: LT) are widely used for bulk and surface acoustic wave devices because of their excellent piezoelectricity and high mechanical Q-factors. However, the frequency temperature coefficients (TCF) of these crystals are relatively large. On the contrary, lithium tetraborate (Li2B4O7: LBO) has high piezoelectricity and a positive TCF. We investigated a method of growing LBO single crystal films on LN and-/or LT substrates in order to achieve piezoelectric substrates with high electromechanical coupling and low TCF.
Keywords :
Q-factor; bulk acoustic wave devices; lithium compounds; piezoelectric devices; piezoelectricity; surface acoustic wave devices; LN substrates; LT substrates; Li2B4O7; LiNbO3; LiTaO3; TCF; bulk acoustic wave devices; electromechanical coupling; frequency temperature coefficients; high mechanical Q-factors; piezoelectricity; surface acoustic wave devices;
Conference_Titel :
European Frequency and Time Forum (EFTF), 2012
Conference_Location :
Gothenburg
Print_ISBN :
978-1-4673-1924-9
DOI :
10.1109/EFTF.2012.6502331
