Title :
Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors
Author :
Quack, Niels ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Ebneter, Christian ; Rahim, Mohamed ; Zogg, Hans
Author_Institution :
ETH Zurich, Zurich
fDate :
Aug. 12 2007-July 16 2007
Abstract :
Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside a Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are sensitive at the resonances only, which depend on the distance between the two mirrors of the cavity. Displacing one of these mirrors allows changing the cavity length and thus selecting the detection wavelength. The design, simulation and fabrication of a MEMS mirror and its integration with the counter mirror and the photodiode grown by molecular beam epitaxy are presented. First results with external mirrors moved by piezoactuation are described, too.
Keywords :
Fabry-Perot resonators; cavity resonators; infrared detectors; integrated optics; micro-optomechanical devices; micromirrors; molecular beam epitaxial growth; optical design techniques; optical fabrication; photodetectors; photodiodes; piezoelectric actuators; Fabry Perot cavity; integrated infrared detectors; microelectromechanical devices; midinfrared detectors; mirror design; mirror fabrication; mirror simulation; molecular beam epitaxy; photodetectors; photodiode; piezoactuation; resonant cavity enhanced detectors; tunable detectors; vertical MEMS mirrors; Counting circuits; Detectors; Fabrication; Glass; Leg; Micromechanical devices; Micromirrors; Mirrors; Photodetectors; Resonance; Tunable RCED; infrared detector; vertical micromirror;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373892
