Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors

Author

Quack, Niels ; Blunier, Stefan ; Dual, Jurg ; Arnold, Martin ; Felder, Ferdinand ; Ebneter, Christian ; Rahim, Mohamed ; Zogg, Hans

Author_Institution

ETH Zurich, Zurich

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

165

Lastpage

166

Abstract

Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside a Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are sensitive at the resonances only, which depend on the distance between the two mirrors of the cavity. Displacing one of these mirrors allows changing the cavity length and thus selecting the detection wavelength. The design, simulation and fabrication of a MEMS mirror and its integration with the counter mirror and the photodiode grown by molecular beam epitaxy are presented. First results with external mirrors moved by piezoactuation are described, too.

Keywords

Fabry-Perot resonators; cavity resonators; infrared detectors; integrated optics; micro-optomechanical devices; micromirrors; molecular beam epitaxial growth; optical design techniques; optical fabrication; photodetectors; photodiodes; piezoelectric actuators; Fabry Perot cavity; integrated infrared detectors; microelectromechanical devices; midinfrared detectors; mirror design; mirror fabrication; mirror simulation; molecular beam epitaxy; photodetectors; photodiode; piezoactuation; resonant cavity enhanced detectors; tunable detectors; vertical MEMS mirrors; Counting circuits; Detectors; Fabrication; Glass; Leg; Micromechanical devices; Micromirrors; Mirrors; Photodetectors; Resonance; Tunable RCED; infrared detector; vertical micromirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373892

Filename

4373892