MEMS Tunable Filters for LWIR Spectral Imaging

The adaptive focal plane array (AFPA) is a new spectral imaging technology integrating an array of MEMS tunable filters with a dual-band IR focal plane array. This will provide the ability to acquire spectrally-tuned spatial information in the LWIR while preserving broadband imaging capability in the MWIR. A key component of this device is the MEMS tunable filter array, which involves consideration of multiple factors: static mechanics, dynamic response, electrical actuation, optical response, and integration compatibility. This paper presents the development and status of the MEMS element and its integration into the AFPA device.