Design and Fabrication of Photonic MEMS Waveguide Modulators

Author

Higo, Akio ; Fujita, Hiroyuki ; Nakano, Yoshiaki ; Toshiyoshi, Hiroshi

Author_Institution

Univ. of Tokyo, Tokyo

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

173

Lastpage

174

Abstract

We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20 pp.

Keywords

actuators; integrated optics; micro-optics; micromechanical devices; optical attenuators; optical modulation; optical waveguides; Si; electrostatic micromechanical structure; evanescent range; optical attenuators; photonic MEMS actuators; photonic MEMS waveguide modulator; silicon optical waveguide modulator; silicon photonic wire waveguide; size 5 mum; size 50 mum; Actuators; Micromechanical devices; Optical attenuators; Optical design; Optical device fabrication; Optical modulation; Optical waveguide theory; Optical waveguides; Process design; Silicon; Optical MEMS; Photonic waveguides; Silicon photonic MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373896

Filename

4373896